The adhesion of AR film on BM photoresist is 0b
Author:Xia descent Time:2021-06-08 08:02 Browse(928)
K4334
/ W" P1 }( V% P0 Y  q% ARecently, when ar film was sputtered on Qimei BM photoresist, the adhesion of AR film on BM glue was 0b, and it all fell off after gently wiping. In the VA area, it was 5b, and the sputtering temperature was about 230-280 ℃. What are the possible reasons and directions? Thank you for your good ideas. 0 h3 F  t5 M4 G: V+ d, C. @。

The adhesion of AR film on BM photoresist is 0b

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